Composition and Properties of Silicon Nitride Thin Films Deposited by Mid-frequency Dual-target Unbalanced Magnetron Sputtering: Fid-Bau Portal

Composition and Properties of Silicon Nitride Thin Films Deposited by Mid-frequency Dual-target Unbalanced Magnetron Sputtering

Wang, C. / Mu, Z.-x. / Liu, B.-b. / Zang, H.-r. / Mu, X.-d.

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Composition and Properties of Silicon Nitride Thin Films Deposited by Mid-frequency Dual-target Unbalanced Magnetron Sputtering

Wang, C. / Mu, Z.-x. / Liu, B.-b. / Zang, H.-r. / Mu, X.-d.

Composition and Properties of Silicon Nitride Thin Films Deposited by Mid-frequency Dual-target Unbalanced Magnetron Sputtering

Wang, C. / Mu, Z.-x. / Liu, B.-b. / Zang, H.-r. / Mu, X.-d.

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Titel:

Composition and Properties of Silicon Nitride Thin Films Deposited by Mid-frequency Dual-target Unbalanced Magnetron Sputtering

Beteiligte:

Wang, C. (Autor:in) / Mu, Z.-x. (Autor:in) / Liu, B.-b. (Autor:in) / Zang, H.-r. (Autor:in) / Mu, X.-d. (Autor:in)

Erschienen in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 29 ; 331-336

Erscheinungsdatum:

01.01.2011

Format / Umfang:

6 pages

ISSN:

1673-2812

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Unbekannt

Klassifikation:

DDC: 620.11

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Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

Shum, P. W. / Tam, W. C. / Li, K. Y. et al. | British Library Online Contents | 2004

Ti nitride phases in thin films deposited by DC magnetron sputtering

Manalia, R. / Biro, D. / Barna, P. B. et al. | British Library Online Contents | 1996

Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering

Patscheider, J. / Diserens, M. / Levy, F. | British Library Online Contents | 1998

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