Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering: Fid-Bau Portal

Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

Shum, P. W. / Tam, W. C. / Li, K. Y. / Zhou, Z. F. / Shen, Y. G.

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Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

Shum, P. W. / Tam, W. C. / Li, K. Y. / Zhou, Z. F. / Shen, Y. G.

Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

Shum, P. W. / Tam, W. C. / Li, K. Y. / Zhou, Z. F. / Shen, Y. G.

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Titel:

Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

Beteiligte:

Shum, P. W. (Autor:in) / Tam, W. C. (Autor:in) / Li, K. Y. (Autor:in) / Zhou, Z. F. (Autor:in) / Shen, Y. G. (Autor:in)

Erschienen in:

WEAR -LAUSANNE- ; 257 ; 1030-1040

Erscheinungsdatum:

01.01.2004

Format / Umfang:

11 pages

ISSN:

0043-1648

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11292

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