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Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth
Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth
Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth
Loreti, S. (Autor:in) / Santoni, A. (Autor:in) / Frycek, R. (Autor:in) / Menicucci, I. (Autor:in) / Minarini, C. (Autor:in) / Sala, D. D. (Autor:in) / Uskokovic, D. P. / Milonjic, S. K. / Rakovic, D. I.
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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