Windowless argon excimer source for surface modification

Elsner, C. / Lenk, M. / Prager, L. et al. | British Library Online Contents | 2006

Characterization of Polycrystalline Si Films Produced by ArF Excimer Laser Irradiation

Chen, T. T. / Chang, C. Y. | British Library Online Contents | 2006

Optical properties of excimer laser annealed polycrystalline Si by spectroscopic ellipsometry

Yu, G. / Soga, T. / Shao, C. L. et al. | British Library Online Contents | 1997

Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth

Loreti, S. / Santoni, A. / Frycek, R. et al. | British Library Online Contents | 2004

X-ray emission spectroscopic studies of silicon precipitation in surface layer of SiO~2 induced by argon excimer laser irradiation

Kurosawa, K. / Herman, P. R. / Kurmaev, E. Z. et al. | British Library Online Contents | 1998