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    Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth

    New search for: Loreti, S.
    New search for: Santoni, A.
    New search for: Frycek, R.
    New search for: Menicucci, I.
    New search for: Minarini, C.
    New search for: Sala, D. D.
    New search for: Uskokovic, D. P.
    New search for: Milonjic, S. K.
    New search for: Rakovic, D. I.

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    Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth

    New search for: Loreti, S.
    New search for: Santoni, A.
    New search for: Frycek, R.
    New search for: Menicucci, I.
    New search for: Minarini, C.
    New search for: Sala, D. D.
    New search for: Uskokovic, D. P.
    New search for: Milonjic, S. K.
    New search for: Rakovic, D. I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth

    New search for: Loreti, S.
    New search for: Santoni, A.
    New search for: Frycek, R.
    New search for: Menicucci, I.
    New search for: Minarini, C.
    New search for: Sala, D. D.
    New search for: Uskokovic, D. P.
    New search for: Milonjic, S. K.
    New search for: Rakovic, D. I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth

    Contributors:

    Loreti, S. (author) / Santoni, A. (author) / Frycek, R. (author) / Menicucci, I. (author) / Minarini, C. (author) / Sala, D. D. (author) / Uskokovic, D. P. / Milonjic, S. K. / Rakovic, D. I.

    Published in:

    Progress in Advanced Materials and Processes ; 43-46

    MATERIALS SCIENCE FORUM ; 453/454

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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