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Methods to reduce the loading effect in selective and non-selective epitaxial growth of sigec layers
Methods to reduce the loading effect in selective and non-selective epitaxial growth of sigec layers
Methods to reduce the loading effect in selective and non-selective epitaxial growth of sigec layers
Hallstedt, J. (Autor:in) / Suvar, E. (Autor:in) / Menon, C. (Autor:in) / Hellstrom, P. E. (Autor:in) / Ostling, M. (Autor:in) / Radamson, H. H. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 109 ; 122-126
01.01.2004
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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