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Methods to reduce the loading effect in selective and non-selective epitaxial growth of sigec layers

Hallstedt, J. / Suvar, E. / Menon, C. / Hellstrom, P. E. / Ostling, M. / Radamson, H. H.

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Methods to reduce the loading effect in selective and non-selective epitaxial growth of sigec layers

Hallstedt, J. / Suvar, E. / Menon, C. / Hellstrom, P. E. / Ostling, M. / Radamson, H. H.

Methods to reduce the loading effect in selective and non-selective epitaxial growth of sigec layers

Hallstedt, J. / Suvar, E. / Menon, C. / Hellstrom, P. E. / Ostling, M. / Radamson, H. H.

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Check availability in my library

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Title:

Methods to reduce the loading effect in selective and non-selective epitaxial growth of sigec layers

Contributors:

Hallstedt, J. (author) / Suvar, E. (author) / Menon, C. (author) / Hellstrom, P. E. (author) / Ostling, M. (author) / Radamson, H. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 109 ; 122-126

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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