4H-SiC Homoepitaxial Growth on Vicinal-Off Angled Si-Face Substrate

Kojima, K. / Ito, S. / Senzaki, J. et al. | British Library Online Contents | 2010

Development of Homoepitaxial Growth Technique on 4H-SiC Vicinal Off Angled Substrate

Kojima, K. / Masumoto, K. / Ito, S. et al. | British Library Online Contents | 2014

Morphological defects and uniformity issues of 4H-SiC homoepitaxial layers grown on off-oriented (0001) Si faces

Sun, G. S. / Liu, X. F. / Gong, Q. C. et al. | British Library Online Contents | 2006

Using Vapour-Liquid-Solid Mechanism for SiC Homoepitaxial Growth on on-axis alpha-SiC (0001) at Low Temperature

Soueidan, M. / Ferro, G. / Cauwet, F. et al. | British Library Online Contents | 2006

Wide-Area Homoepitaxial Growth of 6H-SiC on Nearly On-Axis (0001) by Chemical Vapor Deposition

Nakamura, S.-i. / Kimoto, T. / Matsunami, H. | British Library Online Contents | 2003