Origin of Surface Morphological Defects in 4H-SiC Homoepitaxial Films

Okada, T. / Okamoto, K. / Ochi, K. et al. | British Library Online Contents | 2006

Correlation between Surface Morphological Defects and Crystallographic Defects in SiC

Hatakeyama, T. / Ichinoseki, K. / Yamaguchi, H. et al. | British Library Online Contents | 2012

Effects of Surface Morphological Defects and Crystallographic Defects on Reliability of Thermal Oxides on C-Face

Suzuki, T. / Yamaguchi, H. / Hatakeyama, T. et al. | British Library Online Contents | 2012

Morphological defects and uniformity issues of 4H-SiC homoepitaxial layers grown on off-oriented (0001) Si faces

Sun, G. S. / Liu, X. F. / Gong, Q. C. et al. | British Library Online Contents | 2006

Structure and Origin of Carrot Defects on 4H-SiC Homoepitaxial Layers

Dong, L. / Sun, G.S. / Yu, J. et al. | British Library Online Contents | 2014