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Origin of Surface Morphological Defects in 4H-SiC Homoepitaxial Films
Origin of Surface Morphological Defects in 4H-SiC Homoepitaxial Films
Origin of Surface Morphological Defects in 4H-SiC Homoepitaxial Films
Okada, T. (Autor:in) / Okamoto, K. (Autor:in) / Ochi, K. (Autor:in) / Higashimine, K. (Autor:in) / Kimoto, T. (Autor:in) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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