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Characterization of high-k dielectrics with ToF-SIMS
Characterization of high-k dielectrics with ToF-SIMS
Characterization of high-k dielectrics with ToF-SIMS
Ferrari, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 231/232 ; 609-613
01.01.2004
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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