Ultra Shallow Depth Profiling with SIMS

Ehrke, H.-U. | British Library Online Contents | 2008

SIMS depth profiling of boron ultra shallow junctions using oblique O2+ beams down to 150eV

Juhel, M. / Laugier, F. / Delille, D. et al. | British Library Online Contents | 2006

SIMS backside depth profiling of ultra shallow implants

Yeo, K. L. / Wee, A. T. / See, A. et al. | British Library Online Contents | 2003

Accurate depth profiling for ultra-shallow implants using backside-SIMS

Hongo, C. / Tomita, M. / Takenaka, M. | British Library Online Contents | 2004

Arsenic shallow depth profiling: accurate quantification in SiO~2/Si stack

Barozzi, M. / Giubertoni, D. / Anderle, M. et al. | British Library Online Contents | 2004