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Ultra-shallow arsenic implant depth profiling using low-energy nitrogen beams
Ultra-shallow arsenic implant depth profiling using low-energy nitrogen beams
Ultra-shallow arsenic implant depth profiling using low-energy nitrogen beams
Fearn, S. (author) / Chater, R. (author) / McPhail, D. (author)
APPLIED SURFACE SCIENCE ; 231/232 ; 645-648
2004-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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