Quantification issues of trace metal contaminants on silicon wafers by means of TOF-SIMS, ICP-MS, and TXRF: Fid-Bau Portal

Quantification issues of trace metal contaminants on silicon wafers by means of TOF-SIMS, ICP-MS, and TXRF

Rostam-Khani, P. / Hopstaken, M. J. P. / Vullings, P. / Noij, G. / O Halloran, O. / Claassen, W.

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Quantification issues of trace metal contaminants on silicon wafers by means of TOF-SIMS, ICP-MS, and TXRF

Rostam-Khani, P. / Hopstaken, M. J. P. / Vullings, P. / Noij, G. / O Halloran, O. / Claassen, W.

Quantification issues of trace metal contaminants on silicon wafers by means of TOF-SIMS, ICP-MS, and TXRF

Rostam-Khani, P. / Hopstaken, M. J. P. / Vullings, P. / Noij, G. / O Halloran, O. / Claassen, W.

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Titel:

Quantification issues of trace metal contaminants on silicon wafers by means of TOF-SIMS, ICP-MS, and TXRF

Beteiligte:

Rostam-Khani, P. (Autor:in) / Hopstaken, M. J. P. (Autor:in) / Vullings, P. (Autor:in) / Noij, G. (Autor:in) / O Halloran, O. (Autor:in) / Claassen, W. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 231/232 ; 720-724

Erscheinungsdatum:

01.01.2004

Format / Umfang:

5 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

Rostam-Khani, P. / Philipsen, J. / Jansen, E. et al. | British Library Online Contents | 2006

A correlation of TOF-SIMS and TXRF for the analysis of trace metal contamination on silicon and gallium arsenide

Mowat, I. / Lindley, P. / McCaig, L. | British Library Online Contents | 2003

Quantitative TOF-SIMS analysis of metal contamination on silicon wafers

Zanderigo, F. / Ferrari, S. / Queirolo, G. et al. | British Library Online Contents | 2000

TXRF Semiconductor Applications

Hockett, R. S. | British Library Online Contents | 1994

A different approach in sample preparation method for metallic contamination study by ToF-SIMS and TXRF

Ferlito, E. P. / Alnabulsi, S. / Mello, D. | British Library Online Contents | 2011

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