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Characterization of neon implantation damage in silicon
Characterization of neon implantation damage in silicon
Characterization of neon implantation damage in silicon
Oliviero, E. (author) / Peripolli, S. (author) / Fichtner, P. F. (author) / Amaral, L. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 112 ; 111-115
2004-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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