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Influence of C incorporation on the initial growth of epitaxial NiSi2 on Si(100)
Influence of C incorporation on the initial growth of epitaxial NiSi2 on Si(100)
Influence of C incorporation on the initial growth of epitaxial NiSi2 on Si(100)
Okada, E. (Autor:in) / Nakatsuka, O. (Autor:in) / Oida, S. (Autor:in) / Sakai, A. (Autor:in) / Zaima, S. (Autor:in) / Yasuda, Y. (Autor:in)
APPLIED SURFACE SCIENCE ; 237 ; 150-155
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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