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Ti–Al–Si–N nanocrystalline composite films synthesized by reactive magnetron sputtering
Ti–Al–Si–N nanocrystalline composite films synthesized by reactive magnetron sputtering
Ti–Al–Si–N nanocrystalline composite films synthesized by reactive magnetron sputtering
MATERIALS LETTERS ; 59 ; 171-174
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
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