Ti–Al–Si–N nanocrystalline composite films synthesized by reactive magnetron sputtering

Dong, Y. / Mei, F. / Hu, X. et al. | British Library Online Contents | 2005

Superhard Nb-Si-N composite films synthesized by reactive magnetron sputtering

Dong, Y. / Liu, Y. / Dai, J. et al. | British Library Online Contents | 2006

Microstructure and properties of nanocrystalline titanium monoxide films synthesized by inductively coupled plasma assisted reactive direct current magnetron sputtering

Li, Z. G. / Miyake, S. / Makino, M. et al. | British Library Online Contents | 2008

The microstructure and wettability of the TiOx films synthesized by reactive DC magnetron sputtering

Lin, Z. / Liu, K. / Zhang, Y. C. et al. | British Library Online Contents | 2009

Characterization of RuO"2 films prepared by rf reactive magnetron sputtering

Meng, L.-j. / dos Santos, M.P. | British Library Online Contents | 1999