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Ti–Al–Si–N nanocrystalline composite films synthesized by reactive magnetron sputtering
Ti–Al–Si–N nanocrystalline composite films synthesized by reactive magnetron sputtering
Ti–Al–Si–N nanocrystalline composite films synthesized by reactive magnetron sputtering
MATERIALS LETTERS ; 59 ; 171-174
2005-01-01
4 pages
Article (Journal)
English
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