Diffusion profiles of low dosages chromium ions implanted into (100) crystalline silicon

Salman, F. / Zhang, P. / Chow, L. et al. | British Library Online Contents | 2006

Diffusion modelling of low-energy ion-implanted BF2 in crystalline silicon: Study of fluorine vacancy effect on boron diffusion

Marcon, J. / Merabet, A. | British Library Online Contents | 2008

Atomic transport properties and electrical activation of ultra-low energy implanted boron in crystalline silicon

Privitera, V. / Napolitani, E. / Priolo, F. et al. | British Library Online Contents | 1999

Ion implanted crystalline silicon solar cells with blanket and selective emitter

Jeon, M. / Lee, J. / Kim, S. et al. | British Library Online Contents | 2011

Diffusion of ion-implanted boron impurities into pre-amorphized silicon

Ohno, N. / Hara, T. / Matsunaga, Y. et al. | British Library Online Contents | 2000