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Diffusion models of BF2+ and B+ implanted at low-energy in crystalline silicon
Diffusion models of BF2+ and B+ implanted at low-energy in crystalline silicon
Diffusion models of BF2+ and B+ implanted at low-energy in crystalline silicon
Marcon, J. (author) / Coq, L. I. (author) / Masmoudi, K. (author) / Ketata, K. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 339-344
2004-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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