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Diffusion of ion-implanted boron impurities into pre-amorphized silicon
Diffusion of ion-implanted boron impurities into pre-amorphized silicon
Diffusion of ion-implanted boron impurities into pre-amorphized silicon
Ohno, N. (Autor:in) / Hara, T. (Autor:in) / Matsunaga, Y. (Autor:in) / Current, M. I. (Autor:in) / Inoue, M. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 221-225
01.01.2000
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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