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Effect of excimer laser annealing on the structural properties of silicon germanium films
Effect of excimer laser annealing on the structural properties of silicon germanium films
Effect of excimer laser annealing on the structural properties of silicon germanium films
Sedky, S. (Autor:in) / Schroeder, J. (Autor:in) / Sands, T. (Autor:in) / King, T.-J. (Autor:in) / Howe, R. T. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 3503-3511
01.01.2004
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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