Effect of excimer laser annealing on the structural properties of silicon germanium films

Sedky, S. / Schroeder, J. / Sands, T. et al. | British Library Online Contents | 2004

Implantation and diffusion of phosphorous in germanium

Chroneos, A. / Skarlatos, D. / Tsamis, C. et al. | British Library Online Contents | 2006

Diffusion of phosphorus implanted in germanium

Canneaux, T. / Mathiot, D. / Ponpon, J. P. et al. | British Library Online Contents | 2008

Diffusion and activation of phosphorus in germanium

Tsouroutas, P. / Tsoukalas, D. / Zergioti, I. et al. | British Library Online Contents | 2008

Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide

Hishida, Y. / Watanabe, M. / Nakashima, K. et al. | British Library Online Contents | 2000