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Effect of excimer laser annealing on the structural properties of silicon germanium films
Effect of excimer laser annealing on the structural properties of silicon germanium films
Effect of excimer laser annealing on the structural properties of silicon germanium films
Sedky, S. (author) / Schroeder, J. (author) / Sands, T. (author) / King, T.-J. (author) / Howe, R. T. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 3503-3511
2004-01-01
9 pages
Article (Journal)
English
DDC:
620.11
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