Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Porogen concentration and its desorbing temperature dependence in porous silica film incorporated with ethylene groups
Porogen concentration and its desorbing temperature dependence in porous silica film incorporated with ethylene groups
Porogen concentration and its desorbing temperature dependence in porous silica film incorporated with ethylene groups
Uchida, Y. (Autor:in) / Ito, Y. (Autor:in) / Ishida, K. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 118 ; 250-252
01.01.2005
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Characterization of low-k porous silica films incorporated with alkylene groups
British Library Online Contents | 2002
|Evolution of pores in mesoporous silica films: Porogen loading effect
British Library Online Contents | 2008
|Ultra-Low-k Pure-Silica Zeolite MFI Films Using Cyclodextrin as Porogen
British Library Online Contents | 2003
|Porous extreme low k (ELk) dielectrics using a PECVD porogen approach
British Library Online Contents | 2004
|Argon Plasma Decomposition of Porogen in Mesoporous Silica Films Studied by Positron Annihilation
British Library Online Contents | 2013
|