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Porogen concentration and its desorbing temperature dependence in porous silica film incorporated with ethylene groups
Porogen concentration and its desorbing temperature dependence in porous silica film incorporated with ethylene groups
Porogen concentration and its desorbing temperature dependence in porous silica film incorporated with ethylene groups
Uchida, Y. (author) / Ito, Y. (author) / Ishida, K. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 118 ; 250-252
2005-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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