Precursor properties of calcium -diketonate in vapor phase atomic layer epitaxy

Aarik, J. / Aidla, A. / Jaek, A. et al. | British Library Online Contents | 1994

Atomic layer deposition of ytterbium oxide using b-diketonate and ozone precursors

Bosund, M. / Mizohata, K. / Hakkarainen, T. et al. | British Library Online Contents | 2009

Formation and stability of lanthanum oxide thin films deposited from b-diketonate precursor

Nieminen, M. / Putkonen, M. / Niinisto, L. | British Library Online Contents | 2001

A novel terbium (III) beta-diketonate complex as thin film for optical device application

Zheng, Y. / Lin, J. / Liang, Y. et al. | British Library Online Contents | 2002

SnO2 thin films grown by atomic layer deposition using a novel Sn precursor

Choi, M. J. / Cho, C. J. / Kim, K. C. et al. | British Library Online Contents | 2014