Surface reaction kinetics of metal b-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides

Van, T. T. / Chang, J. P. | British Library Online Contents | 2005

An iron(II) diketonate-diamine complex as precursor for thin film fabrication by atomic layer deposition

Bratvold, J. E. / Carraro, G. / Barreca, D. et al. | British Library Online Contents | 2015

Growth of LaCoO~3 thin films from -diketonate precursors

Seim, H. / Nieminen, M. / Niinistoe, L. et al. | British Library Online Contents | 1997

Precursor properties of calcium -diketonate in vapor phase atomic layer epitaxy

Aarik, J. / Aidla, A. / Jaek, A. et al. | British Library Online Contents | 1994

Group IIA -diketonate Compounds as CVD-Precursors for High-T~c Superconductors

Rees, W. S. / Barron, A. R. | British Library Online Contents | 1993