Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane

Shayapov, V. R. / Rumyantsev, Y. M. / Dzyuba, A. A. et al. | British Library Online Contents | 2013

Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

Vassallo, E. / Cremona, A. / Ghezzi, F. et al. | British Library Online Contents | 2006

Boron carbonitride films deposited by pulsed laser ablation

Perrone, A. / Caricato, A. P. / Luches, A. et al. | British Library Online Contents | 1998

Synthesis of Boron Carbonitride Films by Plasma-Based Ion Implantation

Xu, S.Y. / Ma, X.X. / Sun, M.R. | British Library Online Contents | 2007

Monodispersed boron carbonitride hollow spheres with high-performance microwave absorption property

Zhang, T. / Wen, G. / Wang, Y.P. et al. | British Library Online Contents | 2016