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Ab initio study of the effect of hydrogen and point defects on arsenic segregation at Si (100)/SiO2 interfaces
Ab initio study of the effect of hydrogen and point defects on arsenic segregation at Si (100)/SiO2 interfaces
Ab initio study of the effect of hydrogen and point defects on arsenic segregation at Si (100)/SiO2 interfaces
Ravichandran, K. (Autor:in) / Windl, W. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 359-362
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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