Diffusion of ion-implanted boron impurities into pre-amorphized silicon

Ohno, N. / Hara, T. / Matsunaga, Y. et al. | British Library Online Contents | 2000

Modeling of the transient enhanced diffusion of boron implanted into preamorphized silicon: the case of BF2+ implantation

Dusch, A. / Marcon, J. / Masmoudi, K. et al. | British Library Online Contents | 2001

Modeling of Boron Diffusion in Silicon Carbide

Bracht, H. / Stolwijk, N. A. / Laube, M. et al. | British Library Online Contents | 2001

Investigation of ion-implanted boron in diamond

Bharuth-Ram, K. / Ittermann, B. / Metzner, H. et al. | British Library Online Contents | 1997

Boron Diffusion in Silicon Carbide

Aleksandrov, O.V. / Mokhov, E.N. | British Library Online Contents | 2013