Development and Performance Test of a Micromachined Resonant Accelerometer

Sung, S. / Kang, T. / Hyun, C. et al. | British Library Online Contents | 2004

Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance under Noisy Condition

Hyun, C. / Lee, J. G. / Kang, T. S. | British Library Online Contents | 2006

A High-Performance Fourth-Order Sigma-Delta Micromachined Accelerometer

Li, Y.G. / Liu, X.W. / Xiao, Y. et al. | British Library Online Contents | 2011

Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

Shang, Y.L. / Wang, J.B. / Chen, D.Y. et al. | British Library Online Contents | 2012

Static characterization of bulk micromachined accelerometer structure using a nanoindenter

Mukhiya, R. / Kumar, A. / Kamat, S. V. et al. | British Library Online Contents | 2012