Development of an Oscillation Loop for a Micromachined Differential Type Resonant Accelerometer and Its Performance

Hyun, C. / Lee, J. G. / Kang, T. | British Library Online Contents | 2006

Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

Shang, Y.L. / Wang, J.B. / Chen, D.Y. et al. | British Library Online Contents | 2012

A Monolithic MEMS Accelerometer Process

Li, X.G. / Mei, Y. / Huang, W.G. et al. | British Library Online Contents | 2011

Study on Parameters of MEMS Accelerometer

Ma, S.M. / Chen, C. / Wang, T. et al. | British Library Online Contents | 2013

Development and Performance Test of a Micromachined Resonant Accelerometer

Sung, S. / Kang, T. / Hyun, C. et al. | British Library Online Contents | 2004