Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Competition between internal and heavy doping gettering options in epi-silicon
Competition between internal and heavy doping gettering options in epi-silicon
Competition between internal and heavy doping gettering options in epi-silicon
Frigeri, C. (Autor:in) / Gombia, E. (Autor:in) / Motta, A. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 74-77
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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