Oxygen precipitation in heavily phosphorus-doped silicon wafer annealed at high temperatures

Zeng, Y. / Yang, D. / Ma, X. et al. | British Library Online Contents | 2009

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I. / Yli-Koski, M. / Savin, H. et al. | British Library Online Contents | 2009

Retrograde Melting and Internal Liquid Gettering in Silicon

British Library Online Contents | 2010

Dislocation behavior in heavily germanium-doped silicon crystal

Taishi, T. / Huang, X. / Yonenaga, I. et al. | British Library Online Contents | 2002

Oxide precipitation behavior in heavily doped silicon wafer after rapid thermal process

Sun, S. / Sun, W. / Hao, Q. et al. | British Library Online Contents | 2006