A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Competition between internal and heavy doping gettering options in epi-silicon
Competition between internal and heavy doping gettering options in epi-silicon
Competition between internal and heavy doping gettering options in epi-silicon
Frigeri, C. (author) / Gombia, E. (author) / Motta, A. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 74-77
2006-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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