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Relaxation of strain in patterned strained silicon investigated by UV Raman spectroscopy
Relaxation of strain in patterned strained silicon investigated by UV Raman spectroscopy
Relaxation of strain in patterned strained silicon investigated by UV Raman spectroscopy
Himcinschi, C. (Autor:in) / Radu, I. (Autor:in) / Singh, R. (Autor:in) / Erfurth, W. (Autor:in) / Milenin, A. P. (Autor:in) / Reiche, M. (Autor:in) / Christiansen, S. H. (Autor:in) / Gosele, U. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 184-187
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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