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Relaxation of strain in patterned strained silicon investigated by UV Raman spectroscopy
Relaxation of strain in patterned strained silicon investigated by UV Raman spectroscopy
Relaxation of strain in patterned strained silicon investigated by UV Raman spectroscopy
Himcinschi, C. (author) / Radu, I. (author) / Singh, R. (author) / Erfurth, W. (author) / Milenin, A. P. (author) / Reiche, M. (author) / Christiansen, S. H. (author) / Gosele, U. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 184-187
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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