Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment: Fid-Bau Portal

Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment

Fares, B. / Gautier, B. / Holliger, P. / Baboux, N. / Prudon, G. / Dupuy, J. C.

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Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment

Fares, B. / Gautier, B. / Holliger, P. / Baboux, N. / Prudon, G. / Dupuy, J. C.

Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment

Fares, B. / Gautier, B. / Holliger, P. / Baboux, N. / Prudon, G. / Dupuy, J. C.

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Titel:

Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment

Beteiligte:

Fares, B. (Autor:in) / Gautier, B. (Autor:in) / Holliger, P. (Autor:in) / Baboux, N. (Autor:in) / Prudon, G. (Autor:in) / Dupuy, J. C. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 253 ; 2662-2670

Erscheinungsdatum:

01.01.2006

Format / Umfang:

9 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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