Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment: Fid-Bau Portal

Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment

Fares, B. / Gautier, B. / Holliger, P. / Baboux, N. / Prudon, G. / Dupuy, J. C.

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Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment

Fares, B. / Gautier, B. / Holliger, P. / Baboux, N. / Prudon, G. / Dupuy, J. C.

Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment

Fares, B. / Gautier, B. / Holliger, P. / Baboux, N. / Prudon, G. / Dupuy, J. C.

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Check availability in my library

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Document information

Title:

Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique Formula Not Shown bombardment

Contributors:

Fares, B. (author) / Gautier, B. (author) / Holliger, P. (author) / Baboux, N. (author) / Prudon, G. (author) / Dupuy, J. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 2662-2670

Publication date:

2006-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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