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Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering
Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering
Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering
Sreemany, M. (Autor:in) / Sen, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 2739-2746
01.01.2006
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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