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A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors
A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors
A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors
Lin, T. W. (author) / Hou, M. T. K. (author) / Chen, R. S. (author) / Lee, S.-B. / Kim, Y.-J.
Experimental Mechanics in Nano and Biotechnology ; 1379-1382
KEY ENGINEERING MATERIALS ; 326/328
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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