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Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications

Gupta, S. / Williams, O. A. / Patel, R. J. / Haenen, K.

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Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications

Gupta, S. / Williams, O. A. / Patel, R. J. / Haenen, K.

Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications

Gupta, S. / Williams, O. A. / Patel, R. J. / Haenen, K.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications

Beteiligte:

Gupta, S. (Autor:in) / Williams, O. A. (Autor:in) / Patel, R. J. (Autor:in) / Haenen, K. (Autor:in)

Erschienen in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 21 ; 3037-3046

Erscheinungsdatum:

01.01.2006

Format / Umfang:

10 pages

ISSN:

0884-2914

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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