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    Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications

    New search for: Gupta, S.
    New search for: Williams, O. A.
    New search for: Patel, R. J.
    New search for: Haenen, K.

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    Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications

    New search for: Gupta, S.
    New search for: Williams, O. A.
    New search for: Patel, R. J.
    New search for: Haenen, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications

    New search for: Gupta, S.
    New search for: Williams, O. A.
    New search for: Patel, R. J.
    New search for: Haenen, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications

    Contributors:

    Gupta, S. (author) / Williams, O. A. (author) / Patel, R. J. (author) / Haenen, K. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 21 ; 3037-3046

    Publication date:

    2006-01-01

    Size:

    10 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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