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High-resolution x-ray topography of dislocations in 4H-SiC epilayers
High-resolution x-ray topography of dislocations in 4H-SiC epilayers
High-resolution x-ray topography of dislocations in 4H-SiC epilayers
Kamata, I. (Autor:in) / Tsuchida, H. (Autor:in) / Vetter, W. M. (Autor:in) / Dudley, M. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 22 ; 845-849
01.01.2007
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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