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High-Resolution Topography Analysis on Threading Edge Dislocations in 4H-SiC Epilayers
High-Resolution Topography Analysis on Threading Edge Dislocations in 4H-SiC Epilayers
High-Resolution Topography Analysis on Threading Edge Dislocations in 4H-SiC Epilayers
Kamata, I. (Autor:in) / Nagano, M. (Autor:in) / Tsuchida, H. (Autor:in) / Chen, Y. (Autor:in) / Dudley, M. (Autor:in)
MATERIALS SCIENCE FORUM ; 600/603 ; 305-308
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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