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Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc
Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc
Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc
Niu, E. W. (Autor:in) / Li, L. (Autor:in) / Lv, G. H. (Autor:in) / Chen, H. (Autor:in) / Feng, W. R. (Autor:in) / Fan, S. H. (Autor:in) / Yang, S. Z. (Autor:in) / Yang, X. Z. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING A ; 460-461 ; 135-139
01.01.2007
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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