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    Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc

    New search for: Niu, E. W.
    New search for: Li, L.
    New search for: Lv, G. H.
    New search for: Chen, H.
    New search for: Feng, W. R.
    New search for: Fan, S. H.
    New search for: Yang, S. Z.
    New search for: Yang, X. Z.

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    Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc

    New search for: Niu, E. W.
    New search for: Li, L.
    New search for: Lv, G. H.
    New search for: Chen, H.
    New search for: Feng, W. R.
    New search for: Fan, S. H.
    New search for: Yang, S. Z.
    New search for: Yang, X. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc

    New search for: Niu, E. W.
    New search for: Li, L.
    New search for: Lv, G. H.
    New search for: Chen, H.
    New search for: Feng, W. R.
    New search for: Fan, S. H.
    New search for: Yang, S. Z.
    New search for: Yang, X. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc

    Contributors:

    Niu, E. W. (author) / Li, L. (author) / Lv, G. H. (author) / Chen, H. (author) / Feng, W. R. (author) / Fan, S. H. (author) / Yang, S. Z. (author) / Yang, X. Z. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING A ; 460-461 ; 135-139

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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