UV assisted low temperature nitridation and post deposition oxidation technique for hafnium oxide gate dielectric

Son, S. Y. / Jang, J. H. / Kumar, P. et al. | British Library Online Contents | 2008

Hafnia and hafnia-toughened ceramics

Wang, J. / Li, H. P. / Stevens, R. | British Library Online Contents | 1992

Recent progress in ab initio simulations of hafnia-based gate stacks

Zhu, H. / Tang, C. / Fonseca, L. R. et al. | British Library Online Contents | 2012

Rapid thermal nitridation of thin chromium films

Russell, S. W. / Li, J. / Alford, T. L. et al. | British Library Online Contents | 1995

Impact of post-nitridation annealing on ultra-thin gate oxide performance

He, Y. / Zhang, G. | British Library Online Contents | 2009